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Published June 19, 2006 | Published
Journal Article Open

Tuning nonlinearity, dynamic range, and frequency of nanomechanical resonators

Abstract

We explore an electrostatic mechanism for tuning the nonlinearity of nanomechanical resonators and increasing their dynamic range for sensor applications. We also demonstrate tuning the resonant frequency of resonators both upward and downward. A theoretical model is developed that qualitatively explains the experimental results and serves as a simple guide for design of tunable nanomechanical devices.

Additional Information

© 2006 American Institute of Physics (Received 20 December 2005; accepted 19 April 2006; published online 19 June 2006) The authors acknowledge support from DARPA/MTO (SPAWAR) under Grant No. N66001-02-1-8914. The authors thank C.A. Zorman and M. Mehregany for providing SiC wafers, and are grateful to X.L. Feng, O. Kogan, M.C. Cross, and A. Husain for useful discussions.

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August 22, 2023
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