Published June 1, 1998
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Journal Article
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Surface-micromachined Ta–Si–N beams for use in micromechanics
Abstract
Realization and characterization of free-standing surface-microstructures based on Ta-Si-N films are presented. Due to their significant physical and chemical properties, such ternary films are promising candidates for application in microelectromechanical devices.
Additional Information
© 1998 IOP Publishing Ltd. Received 12 August 1997, accepted for publication 2 December 1997. Print publication: Issue 2 (June 1998).Files
GREjmm98.pdf
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2005-06-08Created from EPrint's datestamp field
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2019-10-02Created from EPrint's last_modified field