Welcome to the new version of CaltechAUTHORS. Login is currently restricted to library staff. If you notice any issues, please email coda@library.caltech.edu
Published July 15, 2004 | public
Journal Article Open

Effective transition rates for epitaxial growth using fast modulation

Abstract

Thin-film deposition is an industrially important process that is highly dependent on the processing conditions. Most films are grown under constant conditions, but a few studies show that modified properties may be obtained with periodic inputs. However, assessing the effects of modulation experimentally becomes impractical with increasing material complexity. Here we consider periodic conditions in which the period is short relative to the time scales of growth. We analyze a stochastic model of thin-film growth, computing effective transition rates associated with rapid periodic process parameters. Combinations of effective rates may exist that are not attainable under steady conditions, potentially enabling new film properties. An algorithm is presented to construct the periodic input for a desired set of effective transition rates. These ideas are demonstrated in three simple examples using kinetic Monte Carlo simulations of epitaxial growth.

Additional Information

©2004 The American Physical Society. Received 31 December 2003; published 13 July 2004. This work was supported by DARPA/NSF under Grant No. DMS-9615858, by AFOSR under Grant No. F49620-95-1-0419, and by NSF. The authors would like to thank Harry Atwater for fruitful discussions.

Files

GALprb04.pdf
Files (394.6 kB)
Name Size Download all
md5:bed7da24c80d998db8d105e6f548a106
394.6 kB Preview Download

Additional details

Created:
August 22, 2023
Modified:
October 13, 2023