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Published March 1, 2004 | Submitted + Published
Journal Article Open

Ultimate limits to inertial mass sensing based upon nanoelectromechanical systems

Abstract

Nanomechanical resonators can now be realized that achieve fundamental resonance frequencies exceeding 1 GHz, with quality factors (Q) in the range 10^3<=Q<=10^5. The minuscule active masses of these devices, in conjunction with their high Qs, translate into unprecedented inertial mass sensitivities. This makes them natural candidates for a variety of mass sensing applications. Here we evaluate the ultimate mass sensitivity limits for nanomechanical resonators operating in vacuo that are imposed by a number of fundamental physical noise processes. Our analyses indicate that nanomechanical resonators offer immense potential for mass sensing—ultimately with resolution at the level of individual molecules.

Additional Information

© 2004 American Institute of Physics. (Received 17 September 2003; accepted 26 November 2003) K.L.E. acknowledges financial support from the National Science Foundation under Grant No. 0216274. Y.T.Y. and M.L.R. are grateful to DARPA MTO/MEMS and SPAWAR for supporting this work under Grant No. N66001-01-X-6004/02-8914/1000000928. The authors acknowledge many fruitful conversations with A. Vandelay.

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Published - EKIjap04.pdf

Submitted - 0309075.pdf

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August 22, 2023
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