Welcome to the new version of CaltechAUTHORS. Login is currently restricted to library staff. If you notice any issues, please email coda@library.caltech.edu
Published February 1996 | Published
Book Section - Chapter Open

A surface-micromachined shear stress imager

Abstract

A new MEMS shear stress sensor imager has been developed and its capability of imaging surface shear stress distribution has been demonstrated. The imager consists of multi-rows of vacuum-insulated shear stress sensors with a 300 /spl mu/m pitch. This small spacing allows it to detect surface flow patterns that could not be directly measured before. The high frequency response (30 kHz) of the sensor under constant temperature bias mode also allows it to be used in high Reynolds number turbulent flow studies. The measurement results in a fully developed turbulent flow agree well with the numerical and experimental results previously published.

Additional Information

© 1996 IEEE. This work is jointly supported by AFOSR and ARPA. The authors would like thank Mr. Trevor Roper for the help in processing and Dr. Chang Liu for the help in imager design.

Attached Files

Published - 00493838.pdf

Files

00493838.pdf
Files (870.9 kB)
Name Size Download all
md5:dde4f0883451da726f415521e2829c21
870.9 kB Preview Download

Additional details

Created:
August 20, 2023
Modified:
October 20, 2023