Welcome to the new version of CaltechAUTHORS. Login is currently restricted to library staff. If you notice any issues, please email coda@library.caltech.edu
Published June 2003 | Published
Book Section - Chapter Open

Nanometer gaps by feedback-controlled electromigration

Abstract

Nanometer-sized gap (or nanogap) is one of the most fundamental devices in the nanotechnology field. Park et. al., first proposed the open-circuit electromigration method to fabricate nanogaps, but the process is only repeatable if Au film is thinner than 20 nm. To overcome these drawbacks, we develop the feedback-controlled electromigration process and find that not only repeatable nanogaps can be created in thicker film (up to 120 nm or thicker in our experiments), but superior gap size control and topology are obtained. Moreover, we develop two new approaches to make free-standing nanogaps. The tunneling current between the nanogap electrodes was used to demonstrate a sensitive pressure and/or temperature sensor. Finally, we also develop a simple thermal-expansion method to measure the gap size without needing delicate instrument.

Additional Information

© 2003 IEEE. This work is supported by the NSF ERC program at Caltech (Award No. EEC-9402726) and the NSF NIRT project (Award No. ECS-0103559).

Attached Files

Published - 01217069.pdf

Files

01217069.pdf
Files (370.0 kB)
Name Size Download all
md5:abad4e7563433b37c1c8bcb390058b66
370.0 kB Preview Download

Additional details

Created:
August 19, 2023
Modified:
October 20, 2023