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Published June 1995 | Published
Journal Article Open

Silicon micromachined SCALED technology

Abstract

Silicon micromachining technology will play an important role in the fabrication of high-bandwidth servo controlled microelectromechanical (mechatronic) components for super-compact disk drives. At the University of California, Los Angeles, and the California Institute of Technology, for the last three years, we have initiated a number of industry-supported joint research projects to develop the necessary technology building blocks for an integrated drive design of the future. These efforts include a silicon read/write head microgimbal with integrated electrical and mechanical interconnects, which targets the next-generation 30% form factor pico-sliders, and an electromagnetic piggyback microactuator in super-high-track-density applications, both of which utilize state-of-the-art silicon micromachining fabrication techniques.

Additional Information

© 1995 IEEE. Manuscript received February 1, 1994; revised September 2, 1994. This work was conducted at the Caltech Micromachining Laboratory with support from the University of California MICRO program and matching funds from the Applied Magnetics, Hewlett-Packard, IBM, Magnacomp, Maxtor, Quantum, Read-Rite and Seagate Technology Corporations, and the National Storage Industry Consortium (NSIC). An earlier version of this paper was presented at the JSME International Conference on Advanced Mechatronics, Tokyo, Japan, Aug. 24, 1994. The authors would like to thank their many colleagues: Amish Desai, Wen Hsieh, Raanan Miller, Weilong Tang, Viktoria Temesvarv, and Shuyun Wu for the results of their combined efforts.

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