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Published August 16, 2018 | Submitted + Supplemental Material + Published
Journal Article Open

Single-particle mass spectrometry with arrays of frequency-addressed nanomechanical resonators

Abstract

One of the main challenges to overcome to perform nanomechanical mass spectrometry analysis in a practical time frame stems from the size mismatch between the analyte beam and the small nanomechanical detector area. We report here the demonstration of mass spectrometry with arrays of 20 multiplexed nanomechanical resonators; each resonator is designed with a distinct resonance frequency which becomes its individual address. Mass spectra of metallic aggregates in the MDa range are acquired with more than one order of magnitude improvement in analysis time compared to individual resonators. A 20 NEMS array is probed in 150 ms with the same mass limit of detection as a single resonator. Spectra acquired with a conventional time-of-flight mass spectrometer in the same system show excellent agreement. We also demonstrate how mass spectrometry imaging at the single-particle level becomes possible by mapping a 4-cm-particle beam in the MDa range and above.

Additional Information

© 2018 The Author(s). This article is licensed under a Creative Commons Attribution 4.0 International License, which permits use, sharing, adaptation, distribution and reproduction in any medium or format, as long as you give appropriate credit to the original author(s) and the source, provide a link to the Creative Commons license, and indicate if changes were made. The images or other third party material in this article are included in the article's Creative Commons license, unless indicated otherwise in a credit line to the material. If material is not included in the article's Creative Commons license and your intended use is not permitted by statutory regulation or exceeds the permitted use, you will need to obtain permission directly from the copyright holder. To view a copy of this license, visit http://creativecommons.org/licenses/by/4.0/. Received 12 December 2017; Accepted 05 June 2018; Published 16 August 2018. We acknowledge support from the LETI Carnot Institute NEMS-MS project, as well as from the European Union through the ERC Enlightened project (616251) and the Marie-Curie Eurotalents incoming (M.S.) fellowship. Author Contributions: All authors contributed to this work. M.G. supervised the fabrication of arrays. The authors declare no competing interests. Data availability: The data that support the findings in this study are available from the corresponding author upon reasonable request.

Attached Files

Published - s41467-018-05783-4.pdf

Submitted - 1712.06694.pdf

Supplemental Material - 41467_2018_5783_MOESM1_ESM.pdf

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Created:
August 19, 2023
Modified:
October 18, 2023