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Published March 14, 2018 | Supplemental Material
Journal Article Open

>1000-Fold Lifetime Extension of a Nickel Electromechanical Contact Device via Graphene

Abstract

Micro-/nano-electromechanical (M/NEM) switches have received significant attention as promising switching devices for a wide range of applications such as computing, radio frequency communication, and power gating devices. However, M/NEM switches still suffer from unacceptably low reliability because of irreversible degradation at the contacting interfaces, hindering adoption in practical applications and further development. Here, we evaluate and verify graphene as a contact material for reliability-enhanced M/NEM switching devices. Atomic force microscopy experiments and quantum mechanics calculations reveal that energy-efficient mechanical contact–separation characteristics are achieved when a few layers of graphene are used as a contact material on a nickel surface, reducing the energy dissipation by 96.6% relative to that of a bare nickel surface. Importantly, graphene displays almost elastic contact–separation, indicating that little atomic-scale wear, including plastic deformation, fracture, and atomic attrition, is generated. We also develop a feasible fabrication method to demonstrate a MEM switch, which has high-quality graphene as the contact material, and verify that the devices with graphene show mechanically stable and elastic-like contact properties, consistent with our nanoscale contact experiment. The graphene coating extends the switch lifetime >103 times under hot switching conditions.

Additional Information

© 2018 American Chemical Society. Received: October 17, 2017. Accepted: February 20, 2018. Published: February 20, 2018. This research was supported by the Center for Integrated Smart Sensors funded by the Ministry of Science, ICT & Future Planning as "Global Frontier Project" (no. CISS-2012054187). J.-H.K. and Y.-H.K were supported by the National Research Foundation of Korea (2015R1A2A2A05027766) and Science Research Center (2016R1A5A1008184) programs. Author Contributions: The manuscript was written through contributions of all authors. All authors have given approval to the final version of the manuscript. The authors declare no competing financial interest.

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