Scanning confocal vibrometer microscope for vibration analysis of energy-harvesting MEMS in wearables
Abstract
We present a scanning confocal laser-Doppler vibrometer microscope for sensitive, contactless measurement of microelectromechanical systems (MEMS). This systems enables the dynamic analysis up to 3.2 MHz with a lateral resolution of few micrometers. We show measurements on developed MEMS for vocal-energy harvesting in wearables and medical implants. For efficient harvesting a cantilever beam with a serpentine form was designed with a fundamental resonance at 200 Hz. We verified the simulated mode shapes with our vibration measurements. The observed deviations in resonance frequencies between simulation and measurement are due to modelling and manufacturing dissimilarities.
Additional Information
© 2017 Oldenbourg Wissenschaftsverlag GmbH. Published Online: 2017-09-20; Published in Print: 2017-09-26. The project on energy harvesters has been funded by the Caltech CI2 program, Powell Foundation, and Heritage Foundation.Attached Files
Published - Scanning_confocal_vibrometer_microscope_for_vibration_analysis_of_energy-harvesting_MEMS_in_wearables.pdf
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Additional details
- Eprint ID
- 82403
- Resolver ID
- CaltechAUTHORS:20171017-083418786
- Caltech Innovation Initiative (CI2)
- Charles Lee Powell Foundation
- Heritage Foundation
- Created
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2017-10-17Created from EPrint's datestamp field
- Updated
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2021-11-15Created from EPrint's last_modified field
- Caltech groups
- Heritage Medical Research Institute