Published January 2017
| public
Book Section - Chapter
Applications of gallium nitride in MEMS and acoustic microsystems
- Creators
- Rais-Zadeh, Mina
- Zhu, Haoshen
- Ansari, Azadeh
Abstract
This paper covers various sensors and microsystems based on gallium nitride (GaN) micro mechanical (acoustic) resonators. III-nitrides have been a subject of extensive research for power electronics as well as photonics applications but their use in micro-electromechanical systems (MEMS) has been limited. In this paper, basic material properties of this group of materials (GaN, AlGaN, and other III-nitrides) are discussed and their current and future applications in MEMS and Microwave circuits are detailed.
Additional Information
© 2017 IEEE. Date Added to IEEE Xplore: 09 March 2017. This work is supported by the ONR under the Young Investigator Program.Additional details
- Eprint ID
- 78694
- DOI
- 10.1109/SIRF.2017.7874356
- Resolver ID
- CaltechAUTHORS:20170629-121707529
- Office of Naval Research (ONR)
- Created
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2017-06-30Created from EPrint's datestamp field
- Updated
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2021-11-15Created from EPrint's last_modified field