Charge-coupled devices detectors with high quantum efficiency at UV wavelengths
Abstract
We report on multilayer high efficiency antireflection coating (ARC) design and development for use at UV wavelengths on CCDs and other Si-based detectors. We have previously demonstrated a set of single-layer coatings, which achieve >50% quantum efficiency (QE) in four bands from 130 to 300 nm. We now present multilayer coating designs that significantly outperform our previous work between 195 and 215 nm. Using up to 11 layers, we present several model designs to reach QE above 80%. We also demonstrate the successful performance of 5 and 11 layer ARCs on silicon and fused silica substrates. Finally, we present a five-layer coating deposited onto a thinned, delta-doped CCD and demonstrate external QE greater than 60% between 202 and 208 nm, with a peak of 67.6% at 206 nm.
Additional Information
© 2016 The Authors. Published by SPIE under a Creative Commons Attribution 3.0 Unported License. Received January 19, 2016; Accepted August 22, 2016. The authors wish to thank the reviewers for their detailed, helpful comments and suggestions. In addition, we wish to thank Frank Greer, Michael Lee, and Layton Baker, all of JPL, for their assistance with ALD processes, and Leslie Wulff for helpful discussions. The research was carried out in part at the Jet Propulsion Laboratory, California Institute of Technology, under a contract with NASA. This work was partially supported by KISS, the W. M. Keck Institute for Space Studies, and by NASA Headquarters under the NASA Earth and Space Science Fellowship Program, NASA Grant NNX11AO07H, and NASA Grant NNX12AF29G. E. T. H. is supported by an NSF Astronomy and Astrophysics Postdoctoral Fellowship under award AST-1402206.Attached Files
Published - JATIS_2_3_036003.pdf
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Additional details
- Eprint ID
- 70959
- Resolver ID
- CaltechAUTHORS:20161007-152230649
- NASA/JPL/Caltech
- Keck Institute for Space Studies (KISS)
- NNX11AO07H
- NASA
- NNX12AF29G
- NASA
- AST-1402206
- NSF Astronomy and Astrophysics Postdoctoral Fellowship
- NASA Earth and Space Science Fellowship
- Created
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2016-10-12Created from EPrint's datestamp field
- Updated
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2021-11-11Created from EPrint's last_modified field
- Caltech groups
- Keck Institute for Space Studies, Space Astrophysics Laboratory