Published October 2015
| public
Book Section - Chapter
Monolithic Mach-Zehnder Interferometer Modulator in an unmodified CMOS process
Abstract
A compact monolithically integrated Mach-Zehnder Interferometer Modulator operating above 1Gbps is demonstrated in an unmodified 180nm CMOS SOI process. This 50µm long structure allows for high density integration of photonics modulators and electrical driver circuitry on a single standard CMOS chip.
Additional Information
© 2015 IEEE. The authors would like to thank MOSIS for chip fabrication as well as Professor Hossein Hashemi of USC and Nankyung Suh Cockerham of MOSIS for technical discussion about CSOI7RF process parameters.Additional details
- Eprint ID
- 62351
- Resolver ID
- CaltechAUTHORS:20151124-075124643
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2015-11-24Created from EPrint's datestamp field
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2021-11-10Created from EPrint's last_modified field