Published July 21, 2009
| Submitted + Published
Patent
Open
MEMS-based, phase-shifting interferometer
Chicago
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Abstract
Provided herein are optical devices fabricated to include a reflective surface, actuators and stress-relieving structures. Systems containing such devices, and methods of manufacturing such devices, are also provided.
Additional Information
Publication number US7564559 B2. Publication type Grant. Application number US 11/446,552. Publication date Jul 21, 2009. Application publication date Dec 6, 2007 Filing date Jun 2, 2006. Priority date Jun 2, 2006. Government interests: The invention was funded in part by Grant Nos. EIA-0122599 awarded by the National Science Foundation and by Grant No. EEC-0318642 awarded by the National Science Foundation. The government may have certain rights in the invention.Attached Files
Published - US7564559.pdf
Submitted - US20070279638.pdf
Files
US20070279638.pdf
Files
(2.9 MB)
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Additional details
- Eprint ID
- 61863
- Resolver ID
- CaltechAUTHORS:20151104-160949584
- NSF
- EIA-0122599
- NSF
- EEC-0318642
- Created
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2015-11-05Created from EPrint's datestamp field
- Updated
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2019-10-03Created from EPrint's last_modified field