Published August 11, 2009
| Submitted + Published
Patent
Open
Method for fabricating vertically-offset interdigitated comb actuator device
Chicago
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Abstract
The present invention relates to systems and methods for fabricating microscanners. The fabrication processes employed pursuant to some embodiments are compatible with well known CMOS fabrication techniques, allowing devices for control, monitoring and/or sensing to be integrated onto a single chip. Both one- and two-dimensional microscanners are described. Applications including optical laser surgery, maskless photolithography, portable displays and large scale displays are described.
Additional Information
Publication number: US7573022 B2. Publication type: Grant. Application number: US 11/492,270. Publication date: Aug 11, 2009. Application publication date: Feb. 1, 2007. Filing date: Jul 25, 2006. Priority date: Jul 27, 2005. Government interests: This invention was made with Government support under NSF Grant Nos. EIA-0122599 and EEC-0318642. The Government has certain rights to this invention. Parent case: This application claims the benefit of priority from U.S. provisional patent application No. 60/793,424, filed Apr. 19, 2006, the entirety of which is incorporated herein by reference. Application title: CMOS-compatible high-performance microscanners, including structures, high-yield simplified fabrication methods and applications.Attached Files
Published - US7573022.pdf
Submitted - US20070026614.pdf
Files
US7573022.pdf
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Additional details
- Alternative title
- CMOS-compatible high-performance microscanners, including structures, high-yield simplified fabrication methods and applications
- Eprint ID
- 61855
- Resolver ID
- CaltechAUTHORS:20151104-153631368
- Created
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2015-11-05Created from EPrint's datestamp field
- Updated
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2019-10-03Created from EPrint's last_modified field