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Published August 2015 | public
Book Section - Chapter

A compact spiral Mach-Zehnder Interferometer Modulator on SOI process

Abstract

A compact, spiral Mach-Zehnder Interferometer Modulator with 9GHz 3dB-band width has been demonstrated. The spiral MZ1 structure allows for high density integration and reduces the cost by wrapping two 3mm long phase shifters in a 550μm×650μm silicon area.

Additional Information

© 2015 IEEE. The authors would like to thank OpSIS for chip fabrication.

Additional details

Created:
August 20, 2023
Modified:
October 25, 2023