Welcome to the new version of CaltechAUTHORS. Login is currently restricted to library staff. If you notice any issues, please email coda@library.caltech.edu
Published October 14, 2015 | Published + Supplemental Material
Journal Article Open

Combining reactive sputtering and rapid thermal processing for synthesis and discovery of metal oxynitrides

Abstract

Recent efforts have demonstrated enhanced tailoring of material functionality with mixed anion materials, yet exploratory research with mixed anion chemistries is limited by the sensitivity of these materials to synthesis conditions. Synthesis of a particular metal oxynitride compound by traditional reactive annealing requires specific, limited ranges of both oxygen and nitrogen chemical potentials to establish equilibrium between the solid-state material and a reactive atmosphere. Using Ta–O–N as an example system, we describe a combination of reactive sputter deposition and rapid thermal processing (RTP) for synthesis of mixed anion inorganic materials. Heuristic optimization of reactive gas pressures to attain a desired anion stoichiometry is discussed, and the ability of RTP to enable amorphous to crystalline transitions without preferential anion loss is demonstrated through the controlled synthesis of nitride, oxide, and oxynitride phases.

Additional Information

© 2015 Materials Research Society. Received 15 February 2015; accepted 28 April 2015. Published online: 27 May 2015. This study is based upon work performed by the Joint Center for Artificial Photosynthesis, a DOE Energy Innovation Hub, supported through the Office of Science of the U.S. Department of Energy (Award No. DESC0004993). The authors thank the Kurt J. Lesker company for assistance with the design of the custom PVD gas handling system.

Attached Files

Published - JMR-JMR30_19-S0884291415001405a.pdf

Supplemental Material - S0884291415001405sup001.pdf

Files

S0884291415001405sup001.pdf
Files (763.3 kB)
Name Size Download all
md5:a306fbc6c29091391d858b0490285d7c
255.2 kB Preview Download
md5:8d904b0eedff1a1711fa0999a4c150a8
508.2 kB Preview Download

Additional details

Created:
August 22, 2023
Modified:
October 25, 2023