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Published 2000 | public
Book Section - Chapter

Chemical vapor deposition membranes

Abstract

This chapter is divided into four sections the first of which treats issues of general relevance to Chemical Vapor Deposition (CVD) of membranes, the second reviews work on dense silica membranes, the third is devoted to Y_2O_3-stabilized ZrO_2 (YSZ) membranes, and the fourth treats CVD of Pd membranes.

Additional Information

© 2000 Elsevier.

Additional details

Created:
August 19, 2023
Modified:
January 13, 2024