Published 2007
| Published + Accepted Version
Book Section - Chapter
Open
Characterization of an Improved, Real-Time MEMS-Based Phase-Shifting Interferometer
- Creators
- Kant, R.
- Garmire, D.
-
Choo, H.
- Muller, R. S.
Chicago
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Abstract
We describe and present detailed performance characterizations for an enhanced version of our MEMS-Based Phase-Shifting Interferometer (MBPSI) that achieves 13 times denser motion reconstruction than our original system. We measure the noise level to be ≤±6 nm λ for a 660 nm laser), and the frequency-resolution to be ≤ 0.03Hz for 31Hz motion captured at 300Hz. We have successfully tracked a piezo-based actuator, driven with an arbitrary waveform composed of transients ≤10Hz.
Additional Information
© 2007 IEEE.Attached Files
Published - 04373838.pdf
Accepted Version - OMEMS_2007_-_Characterization_of_an_Improved,_Real-time_MEMS-Based_Phase-Shifting_Interferometer.pdf
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Additional details
- Eprint ID
- 59108
- Resolver ID
- CaltechAUTHORS:20150731-110953413
- Created
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2015-08-06Created from EPrint's datestamp field
- Updated
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2021-11-10Created from EPrint's last_modified field