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Published December 1996 | public
Journal Article Open

Scaling of MOS technology

Abstract

The MOS transistor is the workhorse of modern microelectronics. Reducing the feature size of CMOS fabrication processes has been the primary method by which ever-increasing computation could proceed at ever-decreasing cost and power consumption. How does this scaling affect device performance? Are there fundamental physical limits to how small die MOS device, as we know it today, can be scaled?

Additional Information

© 1996 IEEE.

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