Published 1982
| public
Journal Article
Sputtering of Al_2O_3 and LiNbO_3 in the electronic stopping region
- Creators
- Qiu, Yuanxun
- Griffith, J. E.
- Tombrello, T. A.
Abstract
Because of recent interest in the role played by the thermal properties of materials that exhibit high energy sputtering, we have sputtered Al_2O_3 and LiNbO_3 with chlorine ions at energies between 3 MeV and 25 MeV. To detect the sputtered Al and Nb we employ thin carbon catcher foils, which are analyzed with Rutherford scattering in the forward direction. Al surface densities of 10^(14)/cm^2 and Nb surface densities of 10^(13)/cm^2 are easily measured. The sputtering yields for both Al_2O_3 and LiNbO_3 increase rapidly with increasing chlorine energy, and the Al and Nb yields are both approximately 0.2 at 20 MeV. Tests for dose, beam current, and contamination effects will be discussed.
Additional Information
© 1982 Gordon and Breach Science Publishers, Inc. Presented at the First International Conference on "Radiation Effects in Insulators", Arco, Lago di Garda, 1981. Supported in part by the National Aeronautics and Space Administration (NGR 05-002-333, NAGW-148), the National Science Foundation (PHY79-23638), and the Caltech President's Fund. Some preliminary experiments were skillfully executed by A. Anderson as part of an undergraduate summer research project. We would like to thank R. A. Weller, S. Trentalange, P. K. Half, and B. H. Cooper for their assistance and suggestions.Additional details
- Alternative title
- Sputtering of Al2O3 and LiNbO3 in the electronic stopping region
- Eprint ID
- 51238
- Resolver ID
- CaltechAUTHORS:20141104-125642115
- NGR 05-002-333
- NASA
- NAGW-148
- NASA
- PHY79-23638
- NSF
- Caltech President's Fund
- Created
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2014-11-04Created from EPrint's datestamp field
- Updated
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2021-11-10Created from EPrint's last_modified field