Published February 2, 1987
| public
Journal Article
Energy cost to sputter an atom from a surface in keV ion bombardment processes
Abstract
We propose that the energy cost to remove one atom from the surface during ion bombard-ment is larger than the surface binding energy or bulk heat of sublimation. It is this value of the energy cost that is appropriate for use in analytic models of the sputtering process.
Additional Information
© 1987 Elsevier Science Publishers B.V. Received 23 September 1986; accepted for publication 16 October 1986. Available online 5 September 2002. The authors would like to acknowledge their respective National Science Foundation grants. D.E.H. thanks the Foundation Research Program of the Naval Postgraduate School and B.J.G. appreciates support from the IBM Corporation and the Camille and Henry Dreyfus Foundation. Helpful comments were received from R. Kelly.Additional details
- Eprint ID
- 51148
- Resolver ID
- CaltechAUTHORS:20141103-071903427
- NSF
- Naval Postgraduate School Foundation Research Program
- IBM Corporation
- Camille and Henry Dreyfus Foundation
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2014-11-03Created from EPrint's datestamp field
- Updated
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2021-11-10Created from EPrint's last_modified field