Published 1980
| public
Journal Article
A thermalized ion explosion model for high energy sputtering and track resignation
Abstract
A velocity spectrum of neutral sputtered particles as well as a low resolution mass spectrum of sputtered molecular ions has been measured for 4.74 MeV ^(19)F^(+2) incident on UF4. The velocity spectrum is dramatically different from spectra taken with low energy (keV) bombarding ions, and is shown to be consistent with a hot plasma of atoms in thermal equilibrium inside the target. We propose a "thermalized ion explosion" model for high energy sputtering which is also expected to describe track formation in dielectric materials. The model is shown to be consistent with the observed total sputtering yield and the dependence of the yield on the primary ionization rate of the incident ion.
Additional Information
© 1980 Gordon and Breach Science Publishers, Inc. Received: 22 Apr 1980; Published online: 19 Aug 2006. The authors wish to thank W. L. Brown for suggesting that we look for molecular clusters being sputtered from UF_4. Supported in part by the National Aeronautics and Space Administration [NGR 05-002-333], the National Science Foundation [PHY79-23638] and the Department of Energy [EX-76-G-03-1305].Additional details
- Eprint ID
- 51133
- Resolver ID
- CaltechAUTHORS:20141031-132356967
- NGR 05-002-333
- NASA
- PHY79-23638
- NSF
- EX-76-G-03-1305
- Department of Energy (DOE)
- Created
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2014-10-31Created from EPrint's datestamp field
- Updated
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2021-11-10Created from EPrint's last_modified field