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Published April 1990 | public
Journal Article

Heavy ion backscattering analysis with a time-of-flight detector

Abstract

We describe a time-of-flight spectrometer for heavy ion RBS. Start and stop signals for the flight time measurement are obtained by detecting the secondary electrons emitted from two thin foils traversed by the ions. MicroChannel plates are used to provide very fast timing signals. The achieved energy resolution of the system is 30 keV (FWHM) at 2 MeV and 75 keV at 10 MeV for ^(35)Cl, which permits a depth resolution of approximately 100 Å for indium profiles in GaAs (normal beam incidence). For ^(16)O the energy resolution is 45 keV at 6 MeV and 110 keV at 12 MeV. We present RBS spectra of thin-layer multielement targets. As possible applications we show indium profiles in In_xGa_(1−x)As heterostructures, As and Ga profiles in a thin layer GaAs sample and a measurement of the silver isotopic ratio in a sputtering experiment.

Additional Information

© 1990 Elsevier Science Publishers B.V. Received 30 August 1989 and in revised form 31 October 1989. Supported in part by the National Science Foundation [DMR86-15641 and DMR88-11795]. Supported in part by a fellowship from the Swiss National Science Foundation. We would like to thank Prof. H. Morkoç, University of Illinois, Urbana, and Prof. M.A. Nicolet, Caltech, for the preparation of the GaAs samples as well as Alan Rice and Steve Stryker for their help in building the spectrometer and running the tandem accelerator. M. Döbeli is indebted to the Swiss National Science Foundation for their financial support.

Additional details

Created:
August 19, 2023
Modified:
October 18, 2023