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Published April 1997 | public
Journal Article

The formation of clusters during large sputtering events

Abstract

We present the results of simulations of cluster formation during Ar^+ → In-Ga (liquid) sputtering events. We find that the indium concentration in small k-atom clusters (k ≤ 4) reflects the concentration in the target at the depth from which the clusters were sputtered. We find a strong correlation between the production of clusters and the size of the events responsible for their production. A simple model for the recombination of uncorrelated emissions into small clusters accurately predicts the production of small k-clusters during events of size N to be Y_k(N) ∼ N_k. However, this uncorrelated recombination model does not predict the proper energy spectra for clusters nor does it predict the oft experimentally observed power law decay of the yield of clusters. We discuss how a model for the recombination of correlated emissions may more readily explain these features.

Additional Information

© 1997 Elsevier Science B.V. Received 14 October 1996. This work was supported in part by the Lawrence Livermore National Laboratory under subcontract B295137 of DOE contract W-7405-ENG-48, and by National Science Foundation grant DMR93-12468 at CSUF.

Additional details

Created:
August 19, 2023
Modified:
October 17, 2023