Theoretical Modeling for a Six-DOF Vortex Inertial Sensor and Experimental Verification
Abstract
This paper reports on a multi-axis fluidic inertial sensor that can detect three components of angular rate and linear acceleration. The sensor uses a vortex gas flow instead of the traditional linear gas flow as the inertial mass to detect the angular rate and linear acceleration. For this complex multi-axis sensing scheme, the theoretical modeling for the sensitivity and the cross-axis sensitivity of the sensor are discussed in detail. During the verification of the sensor's performance, the vortex was created by jetting the air supplied by an external air pump into a detection chamber via two opposing nozzle orifices in opposite directions. A configuration of microfabricated thermistors was constructed to realize multi-axis detection. The measured sensitivities of the gyroscope for the x-axis, y-axis, and z-axis were 0.429, 0.338, and 0.159 mV/°/s, respectively. The measured sensitivities of the accelerometer for the x-axis, y-axis, and z-axis were 0.185, 0.180, and 0.133 V/g, respectively. The results prove that the vortex sensor can effectively detect six-degree-of-freedom spatial motion.
Additional Information
© 2013 IEEE. Manuscript received August 13, 2012; revised May 23, 2013; accepted June 25, 2013. Date of publication July 10, 2013; date of current version September 27, 2013. This work was supported in part by the Chinese National Science Foundation under Grant 61273052, in part by the Chinese New Century Excellent Talents in University under Grant NCET-10-0077, in part by the Shaanxi Province Science and Technology Planning and Innovative Project under Grant 2011KTCQ01-26, and in part by the 111 Project under Grant B13044. Subject Editor C. Liu. The authors gratefully acknowledge Prof. Michael Kraft, Professor at University of Southampton, U.K, for his helpful discussions. Professor Kraft provided many helpful suggestions regarding the content this paper and corrections to grammatical errors.Additional details
- Eprint ID
- 42354
- DOI
- 10.1109/JMEMS.2013.2271862
- Resolver ID
- CaltechAUTHORS:20131111-133549668
- 61273052
- Chinese National Science Foundation
- NCET-10-0077
- Chinese New Century Excellent Talents in University
- 2011KTCQ01-26
- Shaanxi Province Science and Technology Planning and Innovative Project
- B13044
- 111 Project
- Created
-
2013-11-11Created from EPrint's datestamp field
- Updated
-
2021-11-10Created from EPrint's last_modified field
- Other Numbering System Name
- INSPEC Accession Number:
- Other Numbering System Identifier
- 13796374