Diamond nitrogen-vacancy centers created by scanning focused helium ion beam and annealing

Creators: Huang, Z.; Li, W.-D; Santori, C.; Acosta, V. M.; Faraon, A.; Ishikawa, T.; Wu, W.; Winston, D.; Williams, R. S.; Beausoleil, R. G.

Abstract

We demonstrate a method to create nitrogen-vacancy (NV) centers in diamond using focused helium ion microscopy. Near-surface NV centers can be created with spatial resolution below 0.6 μm. We studied the density, creation efficiency, and spectral linewidths at optical and microwave frequencies for NV centers produced using various helium ion implantation doses. The optical linewidths are narrower than those of similar nitrogen-vacancy centers produced using nitrogen ion implantation.

Additional Information

© 2013 AIP Publishing LLC. Received 3 May 2013; accepted 12 August 2013; published online 23 August 2013. This manuscript is based on work supported by the Defense Advanced Research Projects Agency (Award No. HR0011-09-1-0006) and the Regents of the University of California. W.-D. Li was supported in part by the Small Project Funding (201209176202) from the University of Hong Kong. We thank Professor Kai-Mei Fu at the University of Washington for helpful discussions.

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