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Published December 17, 2012 | Published
Journal Article Open

Efficient coupler between silicon photonic and metal-insulator-silicon-metal plasmonic waveguides

Abstract

We report the experimental realization of a compact, efficient coupler between silicon waveguides and vertical metal-insulator-silicon-metal (MISM) plasmonic waveguides. Devices were fabricated using complementary metal-oxide-silicon technology processes, with copper layers that support low-loss plasmonic modes in the MISM structures at a wavelength of 1550 nm. By implementing a short (0.5 μm) optimized metal-insulator-silicon-insulator structure inserted between the photonic and plasmonic waveguide sections, we demonstrate experimental coupling loss of 2.5 dB, despite the high optical confinement of the MISM mode and mismatch with the silicon waveguide mode.

Additional Information

© 2012 American Institute of Physics. Received 7 September 2012; accepted 6 December 2012; published online 21 December 2012. This work has been supported by the French National Agency (ANR) through LETI Carnot Funding. We acknowledge the LETI CMOS platform team for assistance in sample fabrication and K. Gilbert for technical contribution to the optical experiments.

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August 22, 2023
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