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Published February 15, 1982 | Published
Journal Article Open

AlGaAs lasers with micro-cleaved mirrors suitable for monolithic integration

Abstract

A technique has been developed for cleaving the mirrors of AlGaAs lasers without cleaving the substrate. Micro-cleaving involves cleaving a suspended heterostructure cantilever by ultrasonic vibrations. Lasers with microcleaved mirrors have threshold currents and quantum efficiencies identical to those of similar devices with conventionally cleaved mirrors.

Additional Information

© 1982 American Institute of Physics. Received 29 September 1981; accepted for publication 9 November 1981. This research was sponsored by the Defense Advanced Research Projects Agency, the Office of Naval Research and the National Science Foundation.

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August 22, 2023
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