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Published November 1995 | Published
Book Section - Chapter Open

Fluidic shear-stress measurement using surface-micromachined sensors

Abstract

A poly-silicon hot-film shear-stress sensor insulated by a vacuum-chamber underneath has been designed and fabricated by the surface micromachining technology. The sensor is operated at both constant current and constant temperature modes. The dynamic performance (including time constant and cut-off frequency) measurement, calibration, and temperature compensation of the sensor have been realized.

Additional Information

© 1995 IEEE. Date of Current Version: 06 August 2002. This work is supported by AFOSR URI project (University Research Initiative).

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