Published November 1995
| Published
Book Section - Chapter
Open
Polysilicon structures for shear stress sensors
- Creators
- Huang, Jin-Biao
- Ho, Chih-Ming
Abstract
Four types of micromachined polysilicon structures have been designed and fabricated for wall shear stress sensors in flow measurement and control. Their frequency responses, heat transfer characteristics and windtunnel responses have been extensively studied. They are all useful but one may be better than the others depending on the application requirement.
Additional Information
© 1995 IEEE. Issue Date: 6-10 Nov 1995; Date of Current Version: 06 August 2002. This project is sponsored by the Air Force of Scientific Research, Air Force Material Command, USAF, under the grant number F49620-1-93-0332. The authors would like to thank Mr. Trevor Roper for the help with processing and Dr. Steve Tung for the help with wind-tunnel testing.Attached Files
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Additional details
- Eprint ID
- 29319
- Resolver ID
- CaltechAUTHORS:20120215-160303462
- F49620-1-93-0332
- Air Force of Scientific Research (AFOSR)
- Created
-
2012-02-16Created from EPrint's datestamp field
- Updated
-
2021-11-09Created from EPrint's last_modified field
- Other Numbering System Name
- INSPEC Accession Number
- Other Numbering System Identifier
- 5262599