Gas sensors based on gravimetric detection—A review
Abstract
These last 10 years, smaller, less expensive, and higher performance sensors are required for gas sensing applications. To date no true detection principle has been recognized as the best candidate for such application. Microsytems or Micro/Nano Electro Mechanical Systems (M/NEMS) used as gravimetric detectors are among the probable candidates. The technology can indeed be manufactured en masse and can provide multi-gas analysing platform. In this paper, we present a comprehensive overview of micro/nano sensors based on the gravimetric effect to detect an absorbed gas on top of their surfaces. The paper provides a comparison between different electromechanical devices (Bulk Acoustic Wave, Surface Acoustic Wave, Capacitive Micro-machined Ultrasonic Transducer, Micro/Nano cantilevers) with an introduction to gas adsorption mechanisms, material selection, detection principles and design guidance useful to researchers or engineers.
Additional Information
© 2011 Elsevier B.V. Received 1 February 2011. Revised 20 June 2011. Accepted 24 August 2011. Available online 2 September 2011. Authors acknowledge financial support from the French research agency (research programs HOMES & Carnot-NEMS). We thank Dr. I. Bargatin from the California Institute of Technology for fruitful discussions. We would also thank Dr. C. Marcoux, Dr. R. Barattin Dr. T. Bordy, Dr. E. Schultz and Dr. J.C. Gabriel from CEA-LETI-MINATEC for their very useful helps.Additional details
- Eprint ID
- 29245
- DOI
- 10.1016/j.snb.2011.08.066
- Resolver ID
- CaltechAUTHORS:20120210-144856536
- Agence Nationale pour la Recherche (ANR)
- Created
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2012-03-14Created from EPrint's datestamp field
- Updated
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2021-11-09Created from EPrint's last_modified field