Performance of microfabricated piezoelectric vibration energy harvesters

Abstract

Model verification and design of MEMS piezoelectric vibration energy harvesters (MPVEH) are presented, motivated by lowering power requirements of wireless sensor nodes. Applications include structural health monitoring. Coupled electromechanical harvester models are presented and verified (through comparison with experimental data). Harvester material selection is discussed. The model is used to concurrently design a prototype MPVEH and a microfabrication scheme. Targeting low-level (2.5 m/s^2), low-frequency (150 Hz) vibrations, power density (310 μW/cm^3) and voltage (0.4 V_(p-p)) are predicted. Methodologies for scalar analysis and optimization of harvesters are presented with a scheme for chip-level assembly of harvester clusters to meet node requirements.

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