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Published November 1, 2010 | Published
Journal Article Open

Efficient parametric amplification in high and very high frequency piezoelectric nanoelectromechanical systems

Abstract

Parametric amplification in nanomechanical structures is demonstrated by modulating a purely intrinsic mechanical parameter of the system—the stress—via piezoelectric electromechanical coupling. Large resonance amplitude and quality factor enhancement due to parametric pumping are observed under both vacuum and ambient pressure conditions. Exploration of the region of parametric instability yields results that agree with parametric amplification theory.

Additional Information

© 2010 American Institute of Physics. Received 28 July 2010; accepted 29 September 2010; published online 1 November 2010. We thank Mike Cross and Matt Matheny Caltech and Ron Lifshitz Tel Aviv University for many useful discussions and suggestions. We also thank Iwijn De Vlaminck and Gustaaf Borghs IMEC, Leuven, Belgium for providing us with the GaAs material used in this work.

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