Microscaled and nanoscaled platinum sensors

Creators: Rajagopal, Aditya; Walavalkar, Sameer S.; Chen, Samson; Guo, Luke; Gwinn, Tom; Scherer, Axel

Abstract

We show small and robust platinum resistive heaters and thermometers that are defined by microlithography on silicon substrates. These devices can be used for a wide range of applications, including thermal sensor arrays, programmable thermal sources, and even incandescent light emitters. To explore the miniaturization of such devices, we have developed microscaled and nanoscaled platinum resistor arrays with wire widths as small as 75 nm, fabricated lithographically to provide highly localized heating and accurate resistance (and hence temperature) measurements. We present some of these potential applications of microfabricated platinum resistors in sensing and spectroscopy.

Additional Information

© 2010 American Institute of Physics. Received 4 April 2010; accepted 5 September 2010; published online 28 September 2010. The authors would like to acknowledge Michael David Henry, Bophan Chhim, Melissa Melendes, and the Kavli Nanoscience Institute for help with fabrication of the devices. Furthermore, the authors want to acknowledge Professor Joseph Shepherd and Philipp Boettcher for the use of an IR pyrometer that was used to calibrate temperature measurements. Furthermore, we would like to thank Claudia Shin, Raymond Jimenez, Teresa Emery, and Greg Lutrell for helpful insights. This work was supported by a grant from the Boeing Corporation for the investigations into miniaturized sensor systems for mobile platforms (BOEING CT-BA-GTA-1).

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