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Published 2009 | public
Journal Article

BST Films Grown by Metal Organic Chemical Vapor Deposition Incorporating Real-Time Control of Stoichiometry

Abstract

We present preliminary results of metal organic chemical vapor deposition (MOCVD) growth of Ba_xSr_(1-x)TiO_3 (BST) thin films. Films were deposited on MgO, sapphire, Si, and Si/Pt/Ti substrates. Real-time monitoring of the precursor flux by UV absorption spectroscopy was used to control the composition of the films over the range 30 ≤ x ≤ 80. The films were characterized for a number of attributes including composition, crystalline structure, and morphology.

Additional Information

© 2009 Taylor & Francis Group, LLC. Received August 16, 2009; in final form November 23, 2009. This work has been generously supported by the Army Research Office award #W911NF-07-1-0359.

Additional details

Created:
August 22, 2023
Modified:
October 20, 2023