Cavity Optomechanics with Stoichiometric SiN Films
Abstract
We study high-stress SiN films for reaching the quantum regime with mesoscopic oscillators connected to a room-temperature thermal bath, for which there are stringent requirements on the oscillators' quality factors and frequencies. Our SiN films support mechanical modes with unprecedented products of mechanical quality factor Q_m and frequency ν_m reaching Q_(m)ν_(m) ≃ 2 × 10¹³ Hz. The SiN membranes exhibit a low optical absorption characterized by Im(n) ≲ 10⁻⁵ at 935 nm, representing a 15 times reduction for SiN membranes. We have developed an apparatus to simultaneously cool the motion of multiple mechanical modes based on a short, high-finesse Fabry-Perot cavity and present initial cooling results along with future possibilities.
Additional Information
© 2009 American Physical Society. Received 31 August 2009; published 13 November 2009. We thank Oskar Painter for valuable insights, especially into the absorption properties of Si3N4, and D. E. Chang for helpful discussions. This work was supported by the NSF and by IARPA via the ARO. C. R. acknowledges support from the Caltech PMA division - Millikan. S. P. acknowledges the support of the Center for the Physics of Information.Attached Files
Published - Wilson2009p6493Phys_Rev_Lett.pdf
Accepted Version - 0909.0970.pdf
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Additional details
- Eprint ID
- 16902
- Resolver ID
- CaltechAUTHORS:20091208-111445504
- NSF
- Intelligence Advanced Research Projects Activity (IARPA)
- Robert A. Millikan Fellowship
- Caltech Center for the Physics of Information
- Army Research Office (ARO)
- Created
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2009-12-08Created from EPrint's datestamp field
- Updated
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2021-11-08Created from EPrint's last_modified field