High reflectivity high-Q micromechanical Bragg mirror

Creators: Böhm, H. R.; Gigan, S.; Blaser, F.; Zeilinger, A.; Aspelmeyer, M.; Langer, G.; Bäuerle, D.; Hertzberg, J. B.; Schwab, K. C.

Abstract

The authors report on the fabrication and characterization of a micromechanical oscillator consisting only of a freestanding dielectric Bragg mirror with high optical reflectivity and high mechanical quality. The fabrication technique is a hybrid approach involving laser ablation and dry etching. The mirror has a reflectivity of 99.6%, a mass of 400 ng, and a mechanical quality factor Q of approximately 10^4. Using this micromirror in a Fabry-Pérot cavity, a finesse of 500 has been achieved. This is an important step towards designing tunable high-Q high-finesse cavities on chip.

Additional Information

©2006 American Institute of Physics. Received 28 July 2006; accepted 13 October 2006; published 27 November 2006. The authors would like to thank Heidi Piglmayer-Brezina for fabricating the masks for the laser ablation. The authors acknowledge financial support by the Austrian Science Fund (FWF) under the programs SFB15 and P16133-N08, by the Austrian NANO Initiative (MNA), by the European Commission under the Integrated Project Qubit Applications (QAP) funded by the IST Directorate under Contract No. 015846, by grant RFP1-06-14 from The Foundational Questions Institute, and by the City of Vienna.

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Published - BohmApplPhysLett_89_223101.pdf

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